Publications scientifiques

Transcription

1 Publications scientifiques Publications scientifiques Revues: Dittmar A., Dupuis V., Roussel P., Delhomme G., Barbier D., Estève D., Cespuglio R., Martelet C. Multimicrocapteur implantable: une nouvelle approche de la caractérisation des tissus vivants en temps réel. Cahiers d'anthropologie & Biométrie Humaine, 1997, Vol 15, Lysenko V., Gliba V., Strikha V., Dittmar A., Delhomme G., Roussel Ph., Barbier D., Jaffresic-Renault N., Martelet C. Nanoscale nature and low thermal conductivity of porous silicon layers. Applied Surface Science, 1998, Vol 123/124, Lysenko V., Roussel Ph., Delhomme G., Rossokhaty V., Strikha V., Dittmar A., Barbier D. Oxidized porous silicon: a new approach in support thermal isolation of the thermopile based biosensors. Sensors and Actuators A, 1998, Vol 67, Lysenko V., Roussel Ph.,, Remaki B., Delhomme G., Strikha V., Martelet C., Barbier D., Dittmar A. Formation and oxidation of thick and mechanically stable nano porous silicon layers for their application as thermal insulators. J. Porous Mat., 2000, Vol 7, Roussel Ph., Lysenko V., Remaki B., Delhomme G., Dittmar A., Barbier D. Thick oxidized porous silicon layers for the design of a biomedical thermal conductivity microsensor: Sensors and actuators A, 1999, Vol 74, Congrès avec actes Dittmar A., Delhomme G., Roussel Ph., Barbier D. Microcapteurs et microsystèmes biomédicaux. N spécial de la Revue de l'electricité et de l'electronique du congrès mondial de Génie Biologique et Médical Nice'97, Roussel Ph., Lysenko V., Remaki B., Delhomme G., Barbier D. Steady-state and transient finite elements thermal analysis of a silicon/porous silicon microsensors for microcirculation measurement in living tissues. Proceeding of Eurotherm Seminar n 57 on Microscale Heat Transfert, Poitier, France, Juillet 1998 Roussel Ph., Lysenko V., Remaki B., Delhomme G., Barbier D., Thick oxidized porous silicon layers for the design of a biomedical thermal conductivity microsensor, Proceeding of E-MRS'98, Strasbourg, France, 1998, H6 Lysenko V., Roussel Ph., Remaki B., Delhomme G., Dittmar A., Barbier D., Strikha V., Martelet C., Heat Transfer in porous silicon, experiments, theory and applications, Proceeding of Porous Semiconductors Science and technology, Mallorca, Spain, 1998,

2 Publications scientifiques Lysenko V., Roussel Ph, Remaki B., Delhomme G., Dittmar A., Barbier D., Martelet C., Strikha V., Boarino L., Bertola M., Benedetto G., Lerondel G., Amato G. Formation of thick oxidized meso porous silicon layers with low thermal conductivity for thermal isolation applications. Proceeding of Therminic 98, International workshop on thermal investigations of IC s and microstructures, Cannes, France, 1998, Boarino L., Lérondel G., Monticone E., Roussel Ph., Lysenko V.: Design and fabrication of metal bolometers on high porosity silicon layers. Proceeding of Therminic 98, International workshop on thermal investigations of IC s and microstructures, Cannes, France, 1998, Périchon S., Lysenko V.,. Roussel Ph, Remaki B., Champagnon B., Barbier D. Technology and micro-raman Characterization of thick meso-porous silicon layers for thermal effect microsystems. Proceeding of Eurosensors XIII, 1999,

3 Annexes 203

4 204 Annexes

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6 Fichier ANSYS pour la création de la structure en 3D /COM,fichier texte ANSYS 5.4a! nom du fichier de sortie ansys /FILNAM,troisD.dat! legende /TITLE,3D Thermal study of Si membrane + Porous Si /UNITS,SI /PREP7! definition de la structure, les longueurs sont en m eptot=300e-6! épaisseur totale epsio2=40e-6! épaisseur de poreux epsi=eptot-epsio2!épaisseur du silicium longaig=4.7e-3! longueur de l'aiguille largeur=1e-3 epchof=0.5e-6 longchof=336e-6! conductivités thermiques en W/m/øC MP,KXX,1,150! silicium MP,KXX,2,0.5! peau MP,KXX,3,1.5!poreux!MP,RSVX,4,1E-3!PolySi MP,KXX,4,75!MP,C,4,0.5!MP,DENS,4,5000! Géométrie BLOCK,0,longaig,0,epsi,0,-largeur BLOCK,0,longaig,epsi,eptot,0,-largeur BLOCK,longaiglongchof,longaig,eptot,eptot+epchof,0,-largeur BOPTN,keep,no VGLUE,1,2,3 NUMCMP,volu NUMCMP,area WPOFFS,longaig,eptot+epchof,-largeur/2 SPHERE,5E-3 BOPTN,keep,yes vadd,1,2,3 BOPTN,keep,no vsbv,4,5 NUMCMP,volu NUMCMP,line ET,1,70 type,0! thermistance poly nlarg=4 nlong=3 lesize,23,,,nlarg lesize,25,,,nlarg lesize,24,,,nlarg lesize,17,,,nlarg lesize,22,,,1 lesize,29,,,1 lesize,28,,,1 lesize,19,,,1 lesize,20,,,nlong lesize,26,,,nlong lesize,21,,,nlong lesize,27,,,nlong mat,4 VMESH,2! résistance polysi! poreux nlong=20 nlinep=1 lesize,31,,,nlinep lesize,30,,,nlinep lesize,32,,,nlinep lesize,33,,,nlinep lesize,35,,,nlong lesize,34,,,nlong lesize,2,,,nlong lesize,7,,,nlong lesize,11,,,nlarg lesize,12,,,nlarg lesize,17,,,nlarg lesize,18,,,nlarg mat,3 ESHAPE,1!smrtsize,10 VMESH,3! poreux! Si mat,1 smrtsize,5 vmesh,1! tissu lesize,13,,,3 lesize,14,,,3 lesize,15,,,3 lesize,16,,,3 mat,2 vmesh,4 /VIEW,,1,1,1 206

7 Fichier ANSYS de calculs des isothermes pour la structure 3D RESUME,mSi150_P150,db /prep7 MP,KXX,1,150! silicium MP,KXX,2,0.75! tissu MP,KXX,3,1.5!poreux /solu ASEL,S,AREA,,18,19 NSLA,S,1 d,all,temp,310 NSEL,all ASEL,all esel,s,mat,,4 NSLE,s BFE,all,HGEN,,5.952E10! puissance injectée: 1mW=5.952E9 esel,all NSEL,all solve /contour,all,32,310,,312 /GLINE,all,-1 /EDGE,all,1 FINISH /post1 dist=longaig-longchof lpath,node(dist,eptot,-largeur/2),node(dist-1e-3,eptot,-largeur/2),node(0,eptot,-largeur/2) pdef,temp,temp plpath,temp 207

8 Fichier ANSYS de calculs de la réponse indicielle pour la structure 2D RESUME,mSi300+P50,db /prep7 /TITLE, dynamic analysis of a 10mW step into a K=0.75 W/m. C tissue K=150 MP,KXX,1,150! silicium MP,KXX,2,0.593! tissu MP,KXX,3,1.5!poreux MP,DENS,1,2.42E3!Si MP,DENS,2,1E3!tissu MP,DENS,3,2E3!Poreux MP,DENS,4,2.4E3 MP,C,1,716 MP,C,2,4180 MP,C,3,400 MP,C,4,716 power=1e10!10 mw /solu ANTYPE,TRANS TIMINT,ON,THERM OUTRES,,all AUTOTS,ON OUTPR,BASIC,LAST DELTIME,0.02 BFUNIF,temp,310 KBC,1 esel,s,mat,,4 NSLE,s BFE,all,HGEN,,power esel,all NSEL,all TIME,5 SOLVE FINISH /post26 nsol,2,33,temp,,hot nsol,3,194,temp,,cold prvar,2,3 plvar,2,3 208

9 Masque Polysilicium Polysilicium 209

10 Masque Aluminium Aluminium Sonde conductivité thermique tissulaire L.P.M. INSA-LYON Fev

11 Masque Nitrure de Silicium Si 3 N 4 Sonde conductivité thermique tissulaire L.P.M. INSA-LYON Fev

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