Mechanical Engineering Department of SPCE

Transcription

1 BHARTIA VIDYA BHAVAN S SARDAR PATEL COLLEGE OF ENGINEERING (An autonomous institution affiliated to University of Mumbai) Mechanical Engineering Department of SPCE Organizes One Week Training Course (STTP) on Micro Electromechanical Systems (MEMS): DESIGN, FABRICATION AND CHARACTERIZATION 04 th - 08 th January 2016 Under Technical Education Quality Improvement Program (TEQIP) in collaboration with Suman Mashruwala Advance Micro engineering Laboratory, IIT Bombay. Dr. P. H. Sawant Dr. M. M. Murudi Dr. Rajesh Buktar Dr. Kiran S. Bhole Prof. Megha Janbandhu Prof. Sharad Valvi Organizing Body Principal Vice Principal Head of Mechanical Engineering Department Course Coordinator Course Co-Coordinator Course Co-Coordinator ADDRESS FOR CORRESPONDENCE : BHARTIYA VIDYA BHAVAN S SARDAR PATEL COLLEGE OF ENGINEERING, MECHANICAL ENGG DEPARTMENT BHAVAN S CAMPUS, MUNSHI NAGAR, J.P.ROAD, ANDHERI(W), MUMBAI PH: / FAX:

2 SARDAR PATEL COLLEGE OF ENGINEERING Sardar Patel College of Engineering (SPCE) under the management of the Bhartiya Vidya Bhavan, was founded by Kulapati Dr. K. M. Munshi. It was established to meet the growing demand for engineering talent. The foundation stone of the college was laid on 17th September 1961 by Shri. Y. B. Chavan (the then Chief Minister of Maharashtra who later became the Defence Minister of India.) The college was inaugurated by the first Prime Minister of Independent India, Pandit Jawaharlal Nehru in 1962.The college is dedicated to Sardar Vallabhbhai Patel, an eminent nation builder of independent India. The college is autonomous and affiliated to the University of Mumbai for the full-time degree, post graduate, and research programs. The institute has set high standards for aspiring engineering students and also meets the need of quality education in the challenging world of business. Over the last 50 years the college has gained an excellent reputation in the field of Technical Education. SPCE is one of the few colleges that have received Grade A+ rating for its aided courses from the Govt. of Maharashtra which certifies the spirit of excellence that the institute has symbolized and always practiced. Institute celebrated its golden jubilee in the year SUMAN MASHRUWALA ADVANCE MICRO ENGINEERING LABORATORY, IIT BOMBAY The Suman Mashruwala MEMS laboratory development project with clear research and teaching deliverables has been undertaken in the Department of Mechanical Engineering of IIT Bombay with the following objectives 1. To create a laboratory to trigger the young minds of undergraduate students by exposing them to the world of micromechanical systems simulation and experiments. 2. To create the infrastructure needed to start fundamental and applied research in the areas of engineering design, manufacturing and thermal & fluid technology related to MEMS. 3. To create a unique state-of-the-art facility in the institute Laboratory is well equipped with indigenously designed and developed micro fabrication facility for development of three dimensional microstructures, excimer laser machining facility for processing of polymers, silicon for biosensor / micro-fluidic applications and various advanced characterization facility for MEMS. WHO SHOULD ATTEND THE COURSE This course is useful for engineers of different disciplines aspiring towards development of MEMS for various applications ranging from automobile, biomedical etc. The course will be most beneficial for: Engineering graduates and post-graduates (B.E./B. Tech./M.E./M. Tech. in Mechanical, Production, Automobile, Aerospace, Bio-medical, Electrical, Electronics, Chemical Engineering) Professionals in Design, Manufacturing industry Faculty members from academic and research institutions Final year B.E. students who are aspiring for higher education

3 ABOUT MEMS: DESIGN, FABRICATION AND CHARACTERIZATION TRAINING COURSE Why the course on MEMS? Miniaturization and capability to have higher performance with lower cost are basic characteristics of MEMS technology that make it especially attractive and beneficial in diverse applications. For these reasons MEMS components are inevitable in the future devices. This short term course would enable participants to understand and learn various MEMS design, fabrication and characterization techniques. Unique part of this course is blend of theory of MEMS and visit to MEMS research laboratory. Objectives The objective of this course is to provide understanding of design, fabrication and characterization of Microelectromechanical systems. The course emphasizes on learning of design principles and various fabrication techniques for development of microstructures for MEMS. In depth understanding of various recently developed 3D microfabrication techniques for MEMS is also the central objective of the course. Further course is also developed to provide understanding of the geometrical and dynamic characterization techniques for microstructures. Scope Scope of the course ranges from introduction to MEMS to its end use applications. Potential materials for MEMS and its processing will be discussed in the course. Case studies with an aim to demonstrate various principles in design and development of the MEMS will also be discussed. The course also cover the characterization techniques and end use applications of the developed MEMS. With an aim to provide practical exposure hands on sessions on the indigenously designed and developed microfabrication systems and characterization tools for MEMS are planned through laboratory visit at IIT Bombay. Significance This course will provide more insight to the participants for using/developing/researching MEMS devices in their respective organizations for several innovative practical solutions. COURSE FEE AND ACCOMODATION CHARGES Registration Fee Accommodation Charges (per day) Student Faculty (Non- TEQIP colleges) Faculty (TEQIP colleges) Industry / Sponsored Twin shared a/c room Students hostel room (2-3 person sharing) Rs. 2,500 Rs. 5,000 Rs. 10,000 Rs. 20,000 Rs. 2,500 Rs. 500 The registration fees includes Course Material, Media DVD and Breakfast/Tea-snacks/Working Lunch. Registration fee should be paid in the form of cheque/dd drawn in the favor of The Principal, SPCE. Cheque/DD shall be inclusive of accommodation charges. Accommodation is available on first-come first-serve basis. VENUE: SEMINAR HALL (ROOM NO-250), Department of Mechanical Engineering, Sardar Patel College of Engineering. CONTACT DETAILS FOR MORE INFORMATION CONTACT MOBILE Dr. Rajesh Buktar (HOD, Mechanical Engineering Department) r_buktar@spce.ac.in Dr. Kiran S. Bhole (Faculty, Mechanical Engineering Department) Kiran_bhole@spce.ac.in Note: For form submission, fill the attached form and send the scanned copy to kiran_bhole@spce.ac.in

4 TRAINING SCHEDULE AND COURSE CONTENTS DAY CONTENTS OUTCOMES Introduction to MEMS Understanding importance of MEMS Evolution of MEMS Designing process plan for MEMS DAY 1 MEMS Materials and their preparation Designing MEMS DAY 2 DAY 3 DAY 4 Fabrication Processes for MEMS Silicon Micromachining : Surface Silicon Micromachining : Bulk Reverse Micro-EDM Laser based micromachining 3D Micro fabrication (Additive Manufacturing) Microstereolithography (MSL) Bulk Lithography (BL) Visit to MEMS Laboratory Understanding of working principles of processes for 2D MEMS. Comparative assessment and merit demerits of different fabrication processes for 2D MEMS. Understanding variants of 3D microfabrication processes for MEMS. Issues and challenges involved in 3D microfabrication Development of process plan for 3D microfabrication. Essentials of MEMS laboratory Acquiring hands on skills on fabrication processes and characterization tools used in MEMS. DAY 5 Characterization tools for MEMS and micro structures Scanning Electron Microscope White light Interferometer Laser Doppler Vibrometer PATRONS Sample preparation for characterization Understanding working principles of characterization tools for MEMS and micro and nano structures Dr. S. K. Mahajan Dr. Sesha Iyer Dr. P. H. Sawant (Chief Coordinator, SPFU) Director, Directorate of Technical Education (DTE), Maharashtra State, Mumbai Chairman, BOG- Sardar Patel College of Engineering Principal, Sardar Patel College of Engineering

5 ONE WEEK TRAINING COURSE (STTP) under TEQIP On MEMS: DESIGN, FABRICATION AND CHARACTERIZATION 04 th to 08 th January, 2016 SARDAR PATEL COLLEGE OF ENGINEERING (An autonomous institution affiliated to University of Mumbai) Department of Mechanical Engineering Bhavan s Campus, Andheri (West), Mumbai, Maharashtra. Ph: , , Fax: Registration Form Name (in Block Letter): (Mr./Mrs./Ms./Dr) Designation: Educational Qualification: Experience: Organization: Mailing Address: Telephone: Office: Residence: Mobile: DD No. and date: Registration fees (amount paid): Accommodation in Campus: YES/NO (If yes, tick: [Hostel] or [twin shared A/C Room]) Signature of Candidate: Seal and Signature of Sponsoring Authority